The Horiba UVISEL is a phase-modulated spectroscopic ellipsometer capable of measuring optical properties,
film thickness, optical band gap, crystallinity, anisotropic structures, and graded
and non-uniform layers. Spectroscopic ellipsometry has applications in microelectronics
and semiconductors, optical coatings, optoelectronics, photovoltaics, solar cells,
etc. Materials commonly studied are dielectrics, metals, semiconductors, polymers,
organic materials, and monolayers.
System Capabilities:
- Wavelength Range: 190 nm to 830 nm
- Reflectance and Transmittance Measurement
- Allows film thickness measurements from few Angstroms to tens of microns for single layer and complex multilayer stacks for transparent and semi-transparent films
- Measures optical constants such as refractive index (n) and extinction coefficient (k) for bulk substrate and thin films
- Calculation of optical band gap for compound alloys, Si and organic materials
- Characterizes roughness layer, native oxide or an interface
- Capable of mapping film thickness and optical properties